Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim Yong Tae | - |
| dc.contributor.author | 권철순 | - |
| dc.contributor.author | 김동준 | - |
| dc.contributor.author | 이창우 | - |
| dc.contributor.author | 최인훈 | - |
| dc.date.accessioned | 2024-01-13T22:32:52Z | - |
| dc.date.available | 2024-01-13T22:32:52Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/112200 | - |
| dc.language | English | - |
| dc.title | Comparison of amorphous and polycrystalline tungsten nitride diffusion barrier for MOCVD-Cu metallization. | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | Fall meeting of MRS, pp.? | - |
| dc.citation.title | Fall meeting of MRS | - |
| dc.citation.startPage | ? | - |
| dc.citation.endPage | ? | - |
| dc.citation.conferencePlace | US | - |
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