DSpace at KIST: Airflow velocity effect on particle deposition toward a horizontal wafer surface.

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DC Field	Value	Language
dc.contributor.author	Bae Gwi-Nam	-
dc.contributor.author	Chun-Sik Lee	-
dc.contributor.author	NO HEE CHEON	-
dc.date.accessioned	2024-01-13T22:33:29Z	-
dc.date.available	2024-01-13T22:33:29Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/112237	-
dc.language	English	-
dc.subject	particle deposition velocity	-
dc.subject	입자침착속도	-
dc.subject	airflow velocity	-
dc.subject	기류속도	-
dc.subject	thermophoresis	-
dc.subject	열영동	-
dc.subject	horizontal wafer	-
dc.subject	수평웨이퍼	-
dc.title	Airflow velocity effect on particle deposition toward a horizontal wafer surface.	-
dc.title.alternative	기류속도가 수평 웨이퍼상의 입자침착에 미치는 영향 =	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	대한기계학회 '94 년도 추계학술대회논문집 (II)., pp.252 - 257	-
dc.citation.title	대한기계학회 '94 년도 추계학술대회논문집 (II).	-
dc.citation.startPage	252	-
dc.citation.endPage	257	-
dc.citation.conferencePlace	KO	-

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