DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorKim Yong Tae-
dc.contributor.author김동준-
dc.contributor.author박종완-
dc.contributor.author권철순-
dc.contributor.authorMin Suk-Ki-
dc.date.accessioned2024-01-13T22:33:31Z-
dc.date.available2024-01-13T22:33:31Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/112239-
dc.title.alternative구리확산 방지막으로서 TiW/WNx 이중층의 열적안정성에 관한 연구-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국물리학회 제69회 학술논문발표회, pp.?-
dc.citation.title한국물리학회 제69회 학술논문발표회-
dc.citation.startPage?-
dc.citation.endPage?-
dc.citation.conferencePlaceKO-
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