DSpace at KIST: Consideration on the various phenomena appeared at bonding interface in fusion-bonded silicon wafer pairs

Full metadata record

DC Field	Value	Language
dc.contributor.author	방준호	-
dc.contributor.author	Ju Byeong Kwon	-
dc.contributor.author	OH MYUNG HWAN	-
dc.contributor.author	박종완	-
dc.date.accessioned	2024-01-13T23:01:08Z	-
dc.date.available	2024-01-13T23:01:08Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/112362	-
dc.language	English	-
dc.title	Consideration on the various phenomena appeared at bonding interface in fusion-bonded silicon wafer pairs	-
dc.title.alternative	용융접합된 규소 기판쌍에 있어서 접합 계면에 발생하는 제 현상들의 고찰	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	전기학회 하계학술대회, 설악레저텔, pp.1057 - 1059	-
dc.citation.title	전기학회 하계학술대회, 설악레저텔	-
dc.citation.startPage	1057	-
dc.citation.endPage	1059	-
dc.citation.conferencePlace	KO	-

Show Simple Item Record

KIST Library Institutional Repository