Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim Yong Tae | - |
| dc.contributor.author | C. W. Nam | - |
| dc.contributor.author | S. I. Woo | - |
| dc.date.accessioned | 2024-01-13T23:03:10Z | - |
| dc.date.available | 2024-01-13T23:03:10Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/112484 | - |
| dc.language | English | - |
| dc.title | The effects of process conditions on the prperties of SiN film in PECVD process. | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | Proc. int. meeting on chemical eng. & biotechnology: lecture programme, Frankfurt, am Main, pp.? | - |
| dc.citation.title | Proc. int. meeting on chemical eng. & biotechnology: lecture programme, Frankfurt, am Main | - |
| dc.citation.startPage | ? | - |
| dc.citation.endPage | ? | - |
| dc.citation.conferencePlace | GW | - |
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