Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | KANG KWANG NHAM | - |
| dc.contributor.author | Lee Jung Il | - |
| dc.contributor.author | Han Il Ki | - |
| dc.contributor.author | 김상열 | - |
| dc.date.accessioned | 2024-01-13T23:03:46Z | - |
| dc.date.available | 2024-01-13T23:03:46Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/112520 | - |
| dc.language | English | - |
| dc.subject | silicon nitride | - |
| dc.title | Spectroscopic ellipsometry measurements on the silicon nitride films formed by PECVD in InP. | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | 한국물리학회 학술발표회 , 전북대, pp.? | - |
| dc.citation.title | 한국물리학회 학술발표회 , 전북대 | - |
| dc.citation.startPage | ? | - |
| dc.citation.endPage | ? | - |
| dc.citation.conferencePlace | KO | - |
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