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dc.contributor.authorKANG KWANG NHAM-
dc.contributor.authorLee Jung Il-
dc.contributor.authorHan Il Ki-
dc.contributor.authorLEE MYOUNG BOG-
dc.date.accessioned2024-01-13T23:04:23Z-
dc.date.available2024-01-13T23:04:23Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/112557-
dc.languageEnglish-
dc.subjectPECVD-
dc.titleA study on the instability in PECVD-SiNx/InP structure utilizing capacatance and conductnace techniques.-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국물리학회 학술발표회 , 전북대, pp.?-
dc.citation.title한국물리학회 학술발표회 , 전북대-
dc.citation.startPage?-
dc.citation.endPage?-
dc.citation.conferencePlaceKO-
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