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dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorOH MYUNG HWAN-
dc.contributor.author하병주-
dc.contributor.author차균현-
dc.contributor.author김철주-
dc.date.accessioned2024-01-13T23:04:32Z-
dc.date.available2024-01-13T23:04:32Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/112567-
dc.title.alternative실리콘 diaphragm의 일괄제조 공정을 위한 microscopy study-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation센서기술학술대회 (센서학회), 경북대, pp.?-
dc.citation.title센서기술학술대회 (센서학회), 경북대-
dc.citation.startPage?-
dc.citation.endPage?-
dc.citation.conferencePlaceKO-
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