DSpace at KIST: Study on the batch fabrication of silicon diaphragms

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DC Field	Value	Language
dc.contributor.author	하병주	-
dc.contributor.author	Ju Byeong Kwon	-
dc.contributor.author	차균현	-
dc.contributor.author	OH MYUNG HWAN	-
dc.contributor.author	김철주	-
dc.date.accessioned	2024-01-13T23:04:32Z	-
dc.date.available	2024-01-13T23:04:32Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/112568	-
dc.language	English	-
dc.title	Study on the batch fabrication of silicon diaphragms	-
dc.title.alternative	실리콘 diaphragm의 일괄 제조공정 연구	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	전자공학회 추계종합학술대회, 연세대, v.14, no.2, pp.361 - 365	-
dc.citation.title	전자공학회 추계종합학술대회, 연세대	-
dc.citation.volume	14	-
dc.citation.number	2	-
dc.citation.startPage	361	-
dc.citation.endPage	365	-
dc.citation.conferencePlace	KO	-

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