DSpace at KIST: Silicon thin film and p-n junction diode made by CO2 laser-induced CVD method

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DC Field	Value	Language
dc.contributor.author	CHOI WON-KOOK	-
dc.contributor.author	정광호	-
dc.contributor.author	김웅	-
dc.date.accessioned	2024-01-13T23:32:49Z	-
dc.date.available	2024-01-13T23:32:49Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/112729	-
dc.language	English	-
dc.title	Silicon thin film and p-n junction diode made by CO2 laser-induced CVD method	-
dc.title.alternative	CO2 laser-induced CVD법에 의한 silicon박막 및 p-n접합 silicon 제작	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	The proceedings of the 4th applied physics symposium on the surface and interface, pp.115 - ?	-
dc.citation.title	The proceedings of the 4th applied physics symposium on the surface and interface	-
dc.citation.startPage	115	-
dc.citation.endPage	?	-
dc.citation.conferencePlace	KO	-

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