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dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorLEE YUN HI-
dc.contributor.authorKIM Hyoung Gon-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T23:32:58Z-
dc.date.available2024-01-13T23:32:58Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/112738-
dc.title.alternative실리콘의 비등방성 식각을 이용한 집적 센서용 미세 기계 구조의 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation반도체재료 및 부품연구회, CAD연구회 합동학술발표회(전자공학회), 인천대, pp.142 - 146-
dc.citation.title반도체재료 및 부품연구회, CAD연구회 합동학술발표회(전자공학회), 인천대-
dc.citation.startPage142-
dc.citation.endPage146-
dc.citation.conferencePlaceKO-
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