The origin of luminescence from cerium oxide on silicon

Abstract

As the ultra-violet/blue luminescent material, we will introduce the thermal treated cerium oxide on silicon. It has been confirmed a violet/blue luminescence ranging from 358 nm to 450 nm at room temperature from the thermally treated cerium-dioxide thin films on silicon. As a results of AES and HR-TEM measurement, it was confirmed that cerium silicates were generated by thermal treatment. These cerium silicates such as Ce-4.667(SiO4)(3)O and Ce2Si2O7 are the source of the ultraviolet (UV) emission ranging from 358 nn to 450 nm (maximum at 388 nm).