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dc.contributor.authorLEE, CW-
dc.contributor.authorKIM, YT-
dc.contributor.authorMIN, SK-
dc.contributor.authorLEE, C-
dc.contributor.authorLEE, JY-
dc.contributor.authorPARK, TW-
dc.date.accessioned2024-01-19T18:09:03Z-
dc.date.available2024-01-19T18:09:03Z-
dc.date.created2022-03-07-
dc.date.issued1994-
dc.identifier.issn0272-9172-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/119061-
dc.languageEnglish-
dc.publisherMATERIALS RESEARCH SOC-
dc.titleTEM STUDIES OF PLASMA-DEPOSITED TUNGSTEN AND TUNGSTEN NITRIDE BARRIERS FOR THERMALLY STABLE METALLIZATION-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationSymposium on Interface Control of Electrical, Chemical, and Mechanical Properties, at the 1993 Fall Meeting of the Materials-Research-Society, v.318, pp.335 - 340-
dc.citation.titleSymposium on Interface Control of Electrical, Chemical, and Mechanical Properties, at the 1993 Fall Meeting of the Materials-Research-Society-
dc.citation.volume318-
dc.citation.startPage335-
dc.citation.endPage340-
dc.citation.conferencePlaceUS-
dc.citation.conferencePlaceBOSTON, MA-
dc.citation.conferenceDate1993-11-29-
dc.relation.isPartOfINTERFACE CONTROL OF ELECTRICAL, CHEMICAL, AND MECHANICAL PROPERTIES-
dc.identifier.wosidA1994BA46C00046-
dc.identifier.scopusid2-s2.0-0028074163-
dc.type.docTypeProceedings Paper-
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