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dc.contributor.authorJeon, Hwan-Jin-
dc.contributor.authorKim, Ju Young-
dc.contributor.authorJung, Woo-Bin-
dc.contributor.authorJeong, Hyeon-Su-
dc.contributor.authorKim, Yun Ho-
dc.contributor.authorShin, Dong Ok-
dc.contributor.authorJeong, Seong-Jun-
dc.contributor.authorShin, Jonghwa-
dc.contributor.authorKim, Sang Ouk-
dc.contributor.authorJung, Hee-Tae-
dc.date.accessioned2024-01-20T03:03:50Z-
dc.date.available2024-01-20T03:03:50Z-
dc.date.created2021-09-05-
dc.date.issued2016-10-
dc.identifier.issn0935-9648-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/123565-
dc.description.abstractHigh-resolution (10 nm), high-areal density, high-aspect ratio (>5), and morphologically complex nanopatterns are fabricated from a single conventional block copolymer (BCP) structure with a 70 nm scale resolution and an aspect ratio of 1, through the secondary-sputtering phenomenon during the Ar-ion-bombardment process. This approach provides a foundation for the design of new routes to BCP lithography.-
dc.languageEnglish-
dc.publisherWILEY-VCH Verlag GmbH & Co. KGaA, Weinheim-
dc.titleComplex High-Aspect-Ratio Metal Nanostructures by Secondary Sputtering Combined with Block Copolymer Self-Assembly-
dc.typeArticle-
dc.identifier.doi10.1002/adma.201602523-
dc.description.journalClass1-
dc.identifier.bibliographicCitationAdvanced Materials, v.28, no.38, pp.8439 - 8445-
dc.citation.titleAdvanced Materials-
dc.citation.volume28-
dc.citation.number38-
dc.citation.startPage8439-
dc.citation.endPage8445-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000386103700013-
dc.identifier.scopusid2-s2.0-84990221214-
dc.relation.journalWebOfScienceCategoryChemistry, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryChemistry, Physical-
dc.relation.journalWebOfScienceCategoryNanoscience & Nanotechnology-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalWebOfScienceCategoryPhysics, Condensed Matter-
dc.relation.journalResearchAreaChemistry-
dc.relation.journalResearchAreaScience & Technology - Other Topics-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle-
dc.subject.keywordPlusQUANTUM DOTS-
dc.subject.keywordPlusLARGE-AREA-
dc.subject.keywordPlusLITHOGRAPHY-
dc.subject.keywordPlusARRAYS-
dc.subject.keywordPlusTEMPLATES-
dc.subject.keywordPlusPATTERNS-
dc.subject.keywordPlusGRAPHENE-
dc.subject.keywordPlusGOLD-
dc.subject.keywordAuthorblock copolymers-
dc.subject.keywordAuthorhigh aspect ratio-
dc.subject.keywordAuthorhigh resolution-
dc.subject.keywordAuthorplasma reaction-
dc.subject.keywordAuthorsecondary sputtering-
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