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Nanocolumnar Composite Microstructure of Superhard SiC Thin Film Deposited Using Unbalanced Magnetron Sputtering Method

Authors

Bae, K. -E.; Chae, K. -W.; Park, J. -K.; Lee, W. -S.; Baik, Y. -J.

Issue Date

2016-07

Publisher

WILEY-V C H VERLAG GMBH

Citation

ADVANCED ENGINEERING MATERIALS, v.18, no.7, pp.1123 - 1126

Keywords

ELASTIC-MODULUS; HARDNESS; COATINGS; ELASTIC-MODULUS; HARDNESS; COATINGS; SiC

ISSN

1438-1656

URI

https://pubs.kist.re.kr/handle/201004/123925

DOI

10.1002/adem.201600008

Appears in Collections:

KIST Article > 2016

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