Preparation of high modulus thin films based on photocurable azido-functionalized ladder-like structured polysilsesquioxanes

Abstract

A series of azido-functionalized ladder-like structures was prepared by direct azidation of ladder-like structured poly(p-chloromethylphenyl)silsesquioxane (LPCMPSQ) and poly(chloropropyl)silsesquioxane (LPAPSQ) in excellent yields with perfect substitution of the chloro-compounds. The azido-functionalized silsesquioxanes obtained were then photocured without additional photoinitiator to give highly cross-linked thin films with an exceptionally high modulus (> 12 GPa). Furthermore, these materials were shown to be patterned through photolithography to give impeccable micropatterned microstructures.