Oxygen plasma post process to obtain consistent conductance of carbon nanotubes in carbon nanotube field-effect transistors

Authors
Jang, Chi WoongByun, Young TaeWoo, Deok HaLee, SeokJhon, Young Min
Issue Date
2012-10-22
Publisher
AMER INST PHYSICS
Citation
APPLIED PHYSICS LETTERS, v.101, no.17
Abstract
We modified the conductance of carbon nanotubes (CNTs) in carbon nanotube field-effect transistors by oxygen plasma post process (OPPP) to obtain consistent conductance after the CNTs were adsorbed by self-assembly monolayer method which is suitable for large scale mass production but hardly yields consistent conductance due to various complex factors involved. We have shown that the conductance of the CNTs can be tuned from 47 mu S to zero by varying the OPPP time from 0 to 15 s. The reduction rate of the conductance was 9.8%/s implying that a tenth of the CNTs was removed every second. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4762829]
Keywords
SENSORS; REMOVAL; ARRAYS; WAFER; SENSORS; REMOVAL; ARRAYS; WAFER; adsorption; carbon nanotube field effect transistors; carbon nanotubes; electrical conductivity; monolayers; plasma materials processing; self-assembly
ISSN
0003-6951
URI
https://pubs.kist.re.kr/handle/201004/128758
DOI
10.1063/1.4762829
Appears in Collections:
KIST Article > 2012
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