Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 팜두쿠옹 | - |
| dc.contributor.author | 아르빈드 싱 | - |
| dc.contributor.author | 윤의성 | - |
| dc.date.accessioned | 2024-01-21T00:03:16Z | - |
| dc.date.available | 2024-01-21T00:03:16Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 2007-12 | - |
| dc.identifier.issn | 1229-9189 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/133894 | - |
| dc.title | Dual surface modifications of silicon surfaces for tribological application in MEMS | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | KSTLE International Journal, v.8, no.2, pp.26 - 28 | - |
| dc.citation.title | KSTLE International Journal | - |
| dc.citation.volume | 8 | - |
| dc.citation.number | 2 | - |
| dc.citation.startPage | 26 | - |
| dc.citation.endPage | 28 | - |
| dc.subject.keywordAuthor | micro | - |
| dc.subject.keywordAuthor | friction | - |
| dc.subject.keywordAuthor | photolithography | - |
| dc.subject.keywordAuthor | silicon | - |
| dc.subject.keywordAuthor | tribology | - |
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- KIST Article > 2007
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