Novel complex nanostructure from directed assembly of block copolymers on incommensurate surface patterns

Authors
Kim, Sang OukKim, Bong HoonMeng, DongShin, Dong OkKoo, Chong MinSolak, Harun H.Wang, Qiang
Issue Date
2007-10-19
Publisher
WILEY-V C H VERLAG GMBH
Citation
ADVANCED MATERIALS, v.19, no.20, pp.3271 - +
Abstract
A novel complex nanostructure, produced by the directed assembly of a block copolymer thin film on chemically patterned surfaces, is presented. The new nanostructure, which consists of cylinders oriented alternately parallel and perpendicular to the surface (see figure, a result of self-consistent field calculations), demonstrates that a judiciously designed chemical pattern may be used to fabricate a well-ordered complex nanostructure in block copolymer thin films.
Keywords
CONSISTENT-FIELD THEORY; THIN-FILMS; NANOLITHOGRAPHY; ORGANIZATION; LITHOGRAPHY; SIMULATIONS; FABRICATION; MONOLAYERS; TEMPLATES; BLENDS; CONSISTENT-FIELD THEORY; THIN-FILMS; NANOLITHOGRAPHY; ORGANIZATION; LITHOGRAPHY; SIMULATIONS; FABRICATION; MONOLAYERS; TEMPLATES; BLENDS; block copolymer; incommensurability; nanostructure
ISSN
0935-9648
URI
https://pubs.kist.re.kr/handle/201004/134036
DOI
10.1002/adma.200700957
Appears in Collections:
KIST Article > 2007
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