Energy harvesting MEMS device based on thin film piezoelectric cantilevers

Abstract

A thin film lead zirconate titanate Pb(Zr,Ti)O-3 (PZT), energy harvesting MEMS device is developed to enable self-supportive sensors for in-service integrity monitoring of large social and environmental infrastructures at remote locations. It is designed to resonate at specific frequencies of an external vibrational energy source, thereby creating electrical energy via the piezoelectric effect. Our cantilever device has a PZT/SiNx bimorph structure with a proof mass added to the end. The Pt/Ti top electrode is patterned into an interdigitated shape on top of the sol-gel-spin coated PZT thin film in order to employ the d(33) mode. The base-shaking experiment at the first resonant frequency of the cantilever (170 x 260 mu m) generates 1 mu W of continuous electrical power to a 5.2 M Omega resistive load at 2.4 V DC. The effect of proof mass, beam shape and damping on the power generating performance are modeled to provide a design guideline for maximum power harvesting from environmentally available low frequency vibrations. A spiral cantilever is designed to achieve compactness, low resonant frequency and minimum damping coefficient, simultaneously.