Pulsed laser deposition of single phase LiNbO3 thin film waveguides

Abstract

We performed a parametric study to suppress secondary phases in lithium niobate thin films by using pulsed laser deposition (PLD). By reducing the growth rate and changing the ambient gas pressure respectively, we found that the main parameter suppressing secondary phases is controlling the plume strength. For investigating the relation between film phases and the plume strength, extensive parametric studies were performed by changing the oxygen ambient pressure, the target to substrate distance, and also the Li content in the target. The surface morphologies of single phase films obtained with different deposition parameters are compared and deposition parameters to achieve lower loss single-phase films are discussed.