Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, T. W. | - |
dc.contributor.author | Hyun, S. H. | - |
dc.contributor.author | Kim, J. | - |
dc.contributor.author | Lee, J. H. | - |
dc.contributor.author | Lee, H. W. | - |
dc.date.accessioned | 2024-01-21T02:35:40Z | - |
dc.date.available | 2024-01-21T02:35:40Z | - |
dc.date.created | 2021-09-01 | - |
dc.date.issued | 2006-08 | - |
dc.identifier.issn | 1013-9826 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/135310 | - |
dc.description.abstract | In the surface machining of brittle materials, there exists a transition from brittle to ductile modes when the depth of cut is reduced below a critical size using ultrafine abrasive grains. Vitrified grinding wheels containing ultrafine abrasives in the sub-micrometer to nanometer range were fabricated by mechanochemically milling nanoabrasive particles and subsequent viscous sintering of abrasive-binder composites. The grinding characteristics of the nanoabrasive grinding wheels were evaluated for the fine grinding of silicon wafers in terms of a variety of variables. Preliminary wafer grinding results are presented on material removal rate and surface quality of silicon wafers. | - |
dc.language | English | - |
dc.publisher | TRANS TECH PUBLICATIONS LTD | - |
dc.title | Fabrication of nanoabrasive grinding wheels and their application to grinding silicon wafers | - |
dc.type | Article | - |
dc.identifier.doi | 10.4028/www.scientific.net/KEM.317-318.373 | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | SCIENCE OF ENGINEERING CERAMICS III, v.317-318, pp.373 - 376 | - |
dc.citation.title | SCIENCE OF ENGINEERING CERAMICS III | - |
dc.citation.volume | 317-318 | - |
dc.citation.startPage | 373 | - |
dc.citation.endPage | 376 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.identifier.wosid | 000240097700089 | - |
dc.identifier.scopusid | 2-s2.0-33746218747 | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Ceramics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Composites | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | nanoabrasive | - |
dc.subject.keywordAuthor | mechanochemical mixing | - |
dc.subject.keywordAuthor | vitrified bond | - |
dc.subject.keywordAuthor | grinding wheel | - |
dc.subject.keywordAuthor | surface quality | - |
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