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dc.contributor.authorKim, T. W.-
dc.contributor.authorHyun, S. H.-
dc.contributor.authorKim, J.-
dc.contributor.authorLee, J. H.-
dc.contributor.authorLee, H. W.-
dc.date.accessioned2024-01-21T02:35:40Z-
dc.date.available2024-01-21T02:35:40Z-
dc.date.created2021-09-01-
dc.date.issued2006-08-
dc.identifier.issn1013-9826-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/135310-
dc.description.abstractIn the surface machining of brittle materials, there exists a transition from brittle to ductile modes when the depth of cut is reduced below a critical size using ultrafine abrasive grains. Vitrified grinding wheels containing ultrafine abrasives in the sub-micrometer to nanometer range were fabricated by mechanochemically milling nanoabrasive particles and subsequent viscous sintering of abrasive-binder composites. The grinding characteristics of the nanoabrasive grinding wheels were evaluated for the fine grinding of silicon wafers in terms of a variety of variables. Preliminary wafer grinding results are presented on material removal rate and surface quality of silicon wafers.-
dc.languageEnglish-
dc.publisherTRANS TECH PUBLICATIONS LTD-
dc.titleFabrication of nanoabrasive grinding wheels and their application to grinding silicon wafers-
dc.typeArticle-
dc.identifier.doi10.4028/www.scientific.net/KEM.317-318.373-
dc.description.journalClass1-
dc.identifier.bibliographicCitationSCIENCE OF ENGINEERING CERAMICS III, v.317-318, pp.373 - 376-
dc.citation.titleSCIENCE OF ENGINEERING CERAMICS III-
dc.citation.volume317-318-
dc.citation.startPage373-
dc.citation.endPage376-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000240097700089-
dc.identifier.scopusid2-s2.0-33746218747-
dc.relation.journalWebOfScienceCategoryMaterials Science, Ceramics-
dc.relation.journalWebOfScienceCategoryMaterials Science, Composites-
dc.relation.journalResearchAreaMaterials Science-
dc.type.docTypeArticle; Proceedings Paper-
dc.subject.keywordAuthornanoabrasive-
dc.subject.keywordAuthormechanochemical mixing-
dc.subject.keywordAuthorvitrified bond-
dc.subject.keywordAuthorgrinding wheel-
dc.subject.keywordAuthorsurface quality-
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KIST Article > 2006
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