Co-firing of low-and high permittivity dielectric tapes for multifunctional low-temperature co-fired ceramics

Abstract

Based on a same glass composition, the compatibilities in cofiring between low-K and high-K hybrid low-temperature co-firing ceramics material systems were studied. By designing a lithium borosilicate glass frit system carefully, we developed an optimum glass frit system for both low-K and high-K dielectric fillers. The effects of glass addition on the densification and electrical properties in low-K and high-K dielectric materials were examined. By adjusting glass compositions and contents, we tried to match low-K and high-K tapes physically and chemically.