Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kang, GY | - |
dc.contributor.author | Bae, SW | - |
dc.contributor.author | Park, HH | - |
dc.contributor.author | Kim, TS | - |
dc.date.accessioned | 2024-01-21T03:40:43Z | - |
dc.date.available | 2024-01-21T03:40:43Z | - |
dc.date.created | 2021-09-02 | - |
dc.date.issued | 2006-01-23 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/135808 | - |
dc.description.abstract | The use of direct-patternable lead zirconate titanate (PZT) films produced using photosensitive stock solutions with ortho-nitrobenzaldehyde and UV (365 nm) irradiation has reached an advanced stage of application in microdetection systems. Electromechanical properties of direct patterned PZT microcantilevers on SiNx/Ta/Pt/PZT/Pt/SiO2 structure were measured by a laser vibrometer system as a function of cantilever length. The gravimetric sensitivity of cantilevers in air was characterized by Au deposition, and the mass detecting resolution was 38 Hz/ng. These results suggested a possibility that microelectromechanical systems may be fabricated relatively easily and without high cost processes, for example, by PZT dry etching. | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | MEMS | - |
dc.subject | FILM | - |
dc.title | Fabrication and electromechanical properties of a self-actuating Pb(Zr0.52Ti0.48)O-3 microcantilever using a direct patternable sol-gel method | - |
dc.type | Article | - |
dc.identifier.doi | 10.1063/1.2168261 | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | APPLIED PHYSICS LETTERS, v.88, no.4 | - |
dc.citation.title | APPLIED PHYSICS LETTERS | - |
dc.citation.volume | 88 | - |
dc.citation.number | 4 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.identifier.wosid | 000234968600070 | - |
dc.identifier.scopusid | 2-s2.0-31544449753 | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalResearchArea | Physics | - |
dc.type.docType | Article | - |
dc.subject.keywordPlus | MEMS | - |
dc.subject.keywordPlus | FILM | - |
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