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dc.contributor.authorKang, GY-
dc.contributor.authorBae, SW-
dc.contributor.authorPark, HH-
dc.contributor.authorKim, TS-
dc.date.accessioned2024-01-21T03:40:43Z-
dc.date.available2024-01-21T03:40:43Z-
dc.date.created2021-09-02-
dc.date.issued2006-01-23-
dc.identifier.issn0003-6951-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/135808-
dc.description.abstractThe use of direct-patternable lead zirconate titanate (PZT) films produced using photosensitive stock solutions with ortho-nitrobenzaldehyde and UV (365 nm) irradiation has reached an advanced stage of application in microdetection systems. Electromechanical properties of direct patterned PZT microcantilevers on SiNx/Ta/Pt/PZT/Pt/SiO2 structure were measured by a laser vibrometer system as a function of cantilever length. The gravimetric sensitivity of cantilevers in air was characterized by Au deposition, and the mass detecting resolution was 38 Hz/ng. These results suggested a possibility that microelectromechanical systems may be fabricated relatively easily and without high cost processes, for example, by PZT dry etching.-
dc.languageEnglish-
dc.publisherAMER INST PHYSICS-
dc.subjectMEMS-
dc.subjectFILM-
dc.titleFabrication and electromechanical properties of a self-actuating Pb(Zr0.52Ti0.48)O-3 microcantilever using a direct patternable sol-gel method-
dc.typeArticle-
dc.identifier.doi10.1063/1.2168261-
dc.description.journalClass1-
dc.identifier.bibliographicCitationAPPLIED PHYSICS LETTERS, v.88, no.4-
dc.citation.titleAPPLIED PHYSICS LETTERS-
dc.citation.volume88-
dc.citation.number4-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.identifier.wosid000234968600070-
dc.identifier.scopusid2-s2.0-31544449753-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalResearchAreaPhysics-
dc.type.docTypeArticle-
dc.subject.keywordPlusMEMS-
dc.subject.keywordPlusFILM-
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KIST Article > 2006
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