DSpace at KISTKIST Article2005

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dc.contributor.author이은옥-
dc.contributor.author박종극-
dc.contributor.author정증현-
dc.contributor.author임대순-
dc.contributor.author백영준-
dc.date.accessioned2024-01-21T04:11:12Z-
dc.date.available2024-01-21T04:11:12Z-
dc.date.created2021-09-06-
dc.date.issued2005-10-
dc.identifier.issn1738-8228-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/136072-
dc.publisher대한금속·재료학회-
dc.title수소 첨가에 따른 육방정 질화붕소 박막의 표면 구조와 잔류응력 감소에 관한 연구-
dc.title.alternativeEffect of Hydrogen Addition on Surface Structure andResidual Stress of Hexagonal Boron Nitride Thin Films-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation대한금속·재료학회지, v.43, no.10, pp.667 - 671-
dc.citation.title대한금속·재료학회지-
dc.citation.volume43-
dc.citation.number10-
dc.citation.startPage667-
dc.citation.endPage671-
dc.description.journalRegisteredClasskci-
dc.identifier.kciidART001023158-
dc.subject.keywordAuthorhBN-
dc.subject.keywordAuthor수소-
dc.subject.keywordAuthorAr 침투량-
dc.subject.keywordAuthor잔류응력-
dc.subject.keywordAuthor표면구조-
dc.subject.keywordAuthorHydrogen-
dc.subject.keywordAuthorResidual Stress-
dc.subject.keywordAuthorSurface morphology-
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