The actuator for micro moving of a body in a plane

Abstract

In present work, the analysis of moving of positioning table in a plane is indicated. For this purpose, only one piezoelectric motor without intermediate parts is created. Being based on researches of compound ultrasonic piezoelectric systems called "shaking beam" is developed actuator for moving of a body in a plane at any direction. Computer modeling of the actuator is carried out. The prototype is made. The experimental outcomes of the oscillation forms of working surfaces of an actuator are given. (C) 2004 Elsevier B.V. All rights reserved.