DSpace at KISTKIST Article2005

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dc.contributor.author김신근-
dc.contributor.author한용희-
dc.contributor.author문성욱-
dc.date.accessioned2024-01-21T05:04:49Z-
dc.date.available2024-01-21T05:04:49Z-
dc.date.created2022-01-10-
dc.date.issued2005-05-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/136484-
dc.titleA Fabrication of IR CO2 Sensor based on the MEMS and Characteristic Evaluation-
dc.title.alternativeMEMS 기반 IR CO2 센서 제작 및 특성 평가-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation대한전기학회 논문지 (KIEE International Transactions on Electrophysics and Application), v.54C, no.5, pp.232 - 237-
dc.citation.title대한전기학회 논문지 (KIEE International Transactions on Electrophysics and Application)-
dc.citation.volume54C-
dc.citation.number5-
dc.citation.startPage232-
dc.citation.endPage237-
dc.subject.keywordAuthorMEMS-
dc.subject.keywordAuthorCO2 sensor-
dc.subject.keywordAuthormicrobolometer-
dc.subject.keywordAuthorNDIR-
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