DSpace at KIST: Humidity Dependence of the Residual Stress of Diamond-like Carbon Film

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DC Field	Value	Language
dc.contributor.author	이영진	-
dc.contributor.author	김태영	-
dc.contributor.author	이광렬	-
dc.contributor.author	양인상	-
dc.date.accessioned	2024-01-21T05:45:00Z	-
dc.date.available	2024-01-21T05:45:00Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2004-12	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/136947	-
dc.publisher	한국진공학회	-
dc.title	Humidity Dependence of the Residual Stress of Diamond-like Carbon Film	-
dc.title.alternative	습도에 따른 다이아몬드성 카본 필름의 잔류응력 변화에 대한 연구	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	한국진공학회지 (Journal of the Korean Vacuum Society), v.13, no.4, pp.168 - 174	-
dc.citation.title	한국진공학회지 (Journal of the Korean Vacuum Society)	-
dc.citation.volume	13	-
dc.citation.number	4	-
dc.citation.startPage	168	-
dc.citation.endPage	174	-
dc.subject.keywordAuthor	DLC	-
dc.subject.keywordAuthor	stress	-
dc.subject.keywordAuthor	humidity	-
dc.subject.keywordAuthor	압축 잔류 응력	-
dc.subject.keywordAuthor	다이아몬드성 카본 필름	-
dc.subject.keywordAuthor	습도의존성	-
dc.subject.keywordAuthor	in-situ stress measurement	-

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