RNA 형광 검출을 위한 Finger형 PIN 광다이오드의 제작 및 평가

Abstract

This paper represents the development of high sensitivity photo-sensor for the fluorescence detection in the integrated biological analysis system. The finger-type PIN photodiodes were fabricated as the photo-sensor, and had a high sensitivity (Ilight/Idark = 8720). The interference filter consisted of TiO2 and SiO2 was directly deposited on the photodiodes. Deposited filter with 95.5% reflection under 532 nm and 98% transmission over 580 nm exceedingly decreased the magnitude of background signal in the detection. The PDMS micro-fluidic channels are bonded on the photodiode by O2 plasma treatment. The detection current was proportional to two primary parameters (light intensity, concentration), and the onchip detection system could detect fluorescence signals down to 100 nM concentration (LOD = Limit of detection of rhodamine).