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dc.contributor.author배귀남-
dc.date.accessioned2024-01-21T13:30:56Z-
dc.date.available2024-01-21T13:30:56Z-
dc.date.created2022-01-10-
dc.date.issued2000-10-
dc.identifier.issn1226-4881-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/141042-
dc.publisher대한기계학회-
dc.titleInvestigation of the performance characteristics of an in-situ particle monitor at low pressures using aerodynamic lenses-
dc.title.alternative저압상태에서 공기역학적 렌즈를 이용한 in-situ particle monitor의 성능특성 분석-
dc.typeArticle-
dc.description.journalClass2-
dc.identifier.bibliographicCitation대한기계학회논문집B = Transactions of the Korean Society of Mechanical Engineers B, v.24, no.10, pp.1359 - 1367-
dc.citation.title대한기계학회논문집B = Transactions of the Korean Society of Mechanical Engineers B-
dc.citation.volume24-
dc.citation.number10-
dc.citation.startPage1359-
dc.citation.endPage1367-
dc.subject.keywordAuthorin-situ particle monitor-
dc.subject.keywordAuthorparticle beam-
dc.subject.keywordAuthoraerodynamic lens-
dc.subject.keywordAuthorlow pressure-
dc.subject.keywordAuthordetection efficiency-
dc.subject.keywordAuthor실시간 입자측정기-
dc.subject.keywordAuthor입자 빔-
dc.subject.keywordAuthor공기역학적 렌즈-
dc.subject.keywordAuthor저압-
dc.subject.keywordAuthor측정효율-
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