DSpace at KIST: Development of ultra-clean aligning/mounting process of FED spacers using electrostatic bonding

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DC Field	Value	Language
dc.contributor.author	주병권	-
dc.contributor.author	강문식	-
dc.contributor.author	이윤희	-
dc.date.accessioned	2024-01-21T13:30:59Z	-
dc.date.available	2024-01-21T13:30:59Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2000-10	-
dc.identifier.issn	1229-246X	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/141043	-
dc.publisher	대한전기학회	-
dc.title	Development of ultra-clean aligning/mounting process of FED spacers using electrostatic bonding	-
dc.title.alternative	정전 열 접합을 이용한 FED 스페이서의 초청정 정렬/탑재 공정 개발	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	전기학회논문지 C = Transactions of the Korean Institute of Electrical Engneers, v.49C, no.11, pp.635 - 639	-
dc.citation.title	전기학회논문지 C = Transactions of the Korean Institute of Electrical Engneers	-
dc.citation.volume	49C	-
dc.citation.number	11	-
dc.citation.startPage	635	-
dc.citation.endPage	639	-
dc.subject.keywordAuthor	FED spacer	-
dc.subject.keywordAuthor	spacer alignment	-
dc.subject.keywordAuthor	spacer bonding	-
dc.subject.keywordAuthor	electrostatic bonding	-

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