Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이전국 | - |
| dc.date.accessioned | 2024-01-21T14:31:17Z | - |
| dc.date.available | 2024-01-21T14:31:17Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 2000-02 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/141591 | - |
| dc.title | 스퍼터링 박막공정 | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | 세라미스트, v.3, no.1, pp.7 - 10 | - |
| dc.citation.title | 세라미스트 | - |
| dc.citation.volume | 3 | - |
| dc.citation.number | 1 | - |
| dc.citation.startPage | 7 | - |
| dc.citation.endPage | 10 | - |
| dc.subject.keywordAuthor | 스퍼터링 | - |
- Appears in Collections:
- KIST Article > 2000
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