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Effects of Implatation conditions on defect related photoluminescence from si-implanted SiO2 layers

Other Titles

Si 이온이 주입된 SiO2 층에서 결함과 관련된 광루미네슨스의 이온주입 조건에 따른 효과

Authors

김효배; 김태곤; 손정훈; 채근화; 임성일; 황정남; 송종한

Issue Date

2000-01

Publisher

한국물리학회

Citation

새물리, v.40, no.1, pp.46 - 50

Keywords

luminescence; nanocrystal; implantation; SiO2

ISSN

0374-4914

URI

https://pubs.kist.re.kr/handle/201004/141636

Appears in Collections:

KIST Article > 2000

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