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dc.contributor.author책임:김태송-
dc.date.accessioned2024-02-21T05:37:57Z-
dc.date.available2024-02-21T05:37:57Z-
dc.date.issued2005-
dc.identifier.isbn3-540-25377-7-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/149194-
dc.format.extent23-
dc.language2-
dc.publisherSpringer Verlag-
dc.titleMicromanufacturing and Nanotechnology ; Chapter 13. Nanomechanical Cantilever Devices for Biological Sensors (P. 299-321)-
dc.typeBook-
dc.citation.startPage299-
dc.citation.endPage321-
dc.type.docType저서-
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