나노 인덴터를 위한 기체 교환 장치

Author
김소희홍지현백우석강인영안재평
Assignee
한국과학기술연구원
Regitration Date
2024-07-16
Registration No.
12038356
Application Date
2021-05-21
Application No.
17/326337
Country
US
URI
https://pubs.kist.re.kr/handle/201004/150159
Appears in Collections:
KIST Patent > 2021
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