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dc.contributor.author김인호-
dc.contributor.author이도권-
dc.contributor.author이경석-
dc.contributor.author이영석-
dc.contributor.author박종길-
dc.contributor.author정연주-
dc.contributor.author김재욱-
dc.contributor.author박성식-
dc.contributor.author황규원-
dc.date.accessioned2024-10-04T21:30:13Z-
dc.date.available2024-10-04T21:30:13Z-
dc.date.issued2024-09-24-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/150735-
dc.title레이져를 이용한 실리콘 나노구조 제조방법-
dc.typePatent-
dc.date.registration2024-09-24-
dc.date.application2023-01-13-
dc.identifier.patentRegistrationNumber10-2710865-
dc.identifier.patentApplicationNumber10-2023-0005391-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2023
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