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dc.contributor.author김종범-
dc.contributor.author김근필-
dc.contributor.author이관일-
dc.date.accessioned2024-11-29T21:30:24Z-
dc.date.available2024-11-29T21:30:24Z-
dc.date.issued2024-11-21-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/151183-
dc.title크기 변화가 용이한 금속 초박막 기반 실리콘 근적외선 포토다이오드 어레이 제작 기술-
dc.typePatent-
dc.date.registration2024-11-21-
dc.date.application2023-12-26-
dc.identifier.patentRegistrationNumber10-2734367-
dc.identifier.patentApplicationNumber10-2023-0191667-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2023
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