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dc.contributor.author이병철-
dc.contributor.author이활-
dc.contributor.author최리노-
dc.date.accessioned2025-02-14T21:30:08Z-
dc.date.available2025-02-14T21:30:08Z-
dc.date.issued2025-02-04-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/151744-
dc.title정전용량형 미세가공 초음파 트랜스듀서-
dc.typePatent-
dc.date.registration2025-02-04-
dc.date.application2020-01-29-
dc.identifier.patentRegistrationNumber12214380-
dc.identifier.patentApplicationNumber16/775271-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2020
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