DSpace at KISTKIST Patent2024

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dc.contributor.author김진상-
dc.contributor.author최지원-
dc.contributor.author송현철-
dc.contributor.author김성근-
dc.contributor.author백승협-
dc.contributor.author강종윤-
dc.contributor.author허성훈-
dc.contributor.author정홍근-
dc.contributor.author장지수-
dc.date.accessioned2025-11-14T22:07:09Z-
dc.date.available2025-11-14T22:07:09Z-
dc.date.issued2025-11-04-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/153479-
dc.title원자층증착법을 이용한 고유전 SrTiO3 박막 형성 및 이를 이용한 커패시터 제조 방법-
dc.typePatent-
dc.date.registration2025-11-04-
dc.date.application2024-03-04-
dc.identifier.patentRegistrationNumber10-2882748-
dc.identifier.patentApplicationNumber10-2024-0030526-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2024
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