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dc.contributor.author김인수-
dc.contributor.author김춘근-
dc.contributor.author이관일-
dc.contributor.author이원석-
dc.contributor.author강준현-
dc.contributor.author강진구-
dc.contributor.author강구민-
dc.date.accessioned2024-01-12T02:39:44Z-
dc.date.available2024-01-12T02:39:44Z-
dc.date.issued2021-10-12-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/76123-
dc.title분석 시스템을 설치 가능한 박막 증착 장치-
dc.typePatent-
dc.date.registration2021-10-12-
dc.date.application2019-09-19-
dc.identifier.patentRegistrationNumber10-2314076-
dc.identifier.patentApplicationNumber10-2019-0115587-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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