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dc.contributor.author김만호-
dc.date.accessioned2024-01-12T02:40:08Z-
dc.date.available2024-01-12T02:40:08Z-
dc.date.issued2020-08-18-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/76141-
dc.title1차원 중성자 검출기를 이용하여, 양각 음각된 패턴의 각 각의 평균 선폭두께, 선폭분산도 및 평균 주기성을 대면적에서 비파괴로 측정하는 방법-
dc.typePatent-
dc.date.registration2020-08-18-
dc.date.application2019-07-17-
dc.identifier.patentRegistrationNumber10-2147170-
dc.identifier.patentApplicationNumber10-2019-0086438-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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