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dc.contributor.author고은정-
dc.contributor.author최정혜-
dc.date.accessioned2024-01-12T02:40:57Z-
dc.date.available2024-01-12T02:40:57Z-
dc.date.issued2020-07-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/76176-
dc.title얇은 게이트 산화막의 터널링 특성 분석 방법-
dc.typePatent-
dc.date.registration2020-07-29-
dc.date.application2018-10-25-
dc.identifier.patentRegistrationNumber10-2140968-
dc.identifier.patentApplicationNumber10-2018-0128129-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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