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dc.contributor.author이욱성-
dc.contributor.author채기웅-
dc.contributor.author정증현-
dc.contributor.author백영준-
dc.date.accessioned2024-01-12T04:31:11Z-
dc.date.available2024-01-12T04:31:11Z-
dc.date.issued2009-10-23-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/78009-
dc.title양광주가 존재하지 않는 직류 전원 플라스마 증착 장치와 양광주를 배제한 상태에서의 물질 증착 방법 및 이에 의해 제조된 다이아몬드 박막-
dc.typePatent-
dc.date.registration2009-10-23-
dc.date.application2007-05-10-
dc.identifier.patentRegistrationNumber0924287-
dc.identifier.patentApplicationNumber2007-0045695-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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