DSpace at KISTKIST PatentOthers

Full metadata record

DC Field Value Language
dc.contributor.author한승희-
dc.contributor.author김영우-
dc.contributor.author이연희-
dc.date.accessioned2024-01-12T04:33:31Z-
dc.date.available2024-01-12T04:33:31Z-
dc.date.issued2006-04-26-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/78108-
dc.title대출력 펄스 RF 플라즈마를 이용한 매몰 절연막 제조장치 및 제조방법-
dc.typePatent-
dc.date.registration2006-04-26-
dc.date.application2004-12-07-
dc.identifier.patentRegistrationNumber576194-
dc.identifier.patentApplicationNumber2004-0102291-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
Appears in Collections:
KIST Patent > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE