실리콘기판의 용융 접합방법 및 장치

Author
오명환강광남주병권
Assignee
한국과학기술연구원
Regitration Date
1993-12-28
Registration No.
5,273,205
Application Date
1992-11-17
Application No.
07/977,460
Country
US
URI
https://pubs.kist.re.kr/handle/201004/78671
Appears in Collections:
KIST Patent > Others
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