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dc.contributor.author고석근-
dc.contributor.author조정-
dc.contributor.author최원국-
dc.contributor.author정형진-
dc.date.accessioned2024-01-12T05:37:26Z-
dc.date.available2024-01-12T05:37:26Z-
dc.date.issued2007-11-28-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/78827-
dc.title이온빔을 이용한 재료의 표면 처리 장치-
dc.typePatent-
dc.date.registration2007-11-28-
dc.date.application1998-12-04-
dc.identifier.patentRegistrationNumberZL200410074975.5-
dc.identifier.patentApplicationNumber200410074975.5-
dc.publisher.countryCC-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > Others
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