DSpace at KISTKIST Conference Paper2019

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dc.contributor.authorGwangyeob Lee-
dc.contributor.author한경탁-
dc.contributor.authorShin Ik Kim-
dc.contributor.author김영민-
dc.contributor.authorBAEK, SEUNG HYUB-
dc.contributor.author김도향-
dc.contributor.authorHye Jung Chang-
dc.date.accessioned2024-01-12T05:42:10Z-
dc.date.available2024-01-12T05:42:10Z-
dc.date.created2021-09-29-
dc.date.issued2019-02-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/79029-
dc.languageEnglish-
dc.publisher한국반도체학술대회-
dc.titleAtomic-scale crystal patterning in the oxide film by the electron beam irradiation-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제 26회 한국반도체학술대회-
dc.citation.title제 26회 한국반도체학술대회-
dc.citation.conferencePlaceKO-
dc.citation.conferencePlace강원도 웰리힐리파크-
dc.citation.conferenceDate2019-02-13-
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KIST Conference Paper > 2019
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