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dc.contributor.author한승희-
dc.contributor.author서민-
dc.contributor.author신상범-
dc.contributor.author강운현-
dc.contributor.author전신영-
dc.contributor.author조민경-
dc.date.accessioned2024-01-12T06:02:24Z-
dc.date.available2024-01-12T06:02:24Z-
dc.date.issued2022-08-04-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/79203-
dc.title강자성체 박막의 마그네트론 스퍼터링 방법-
dc.typePatent-
dc.date.registration2022-08-04-
dc.date.application2021-04-20-
dc.identifier.patentRegistrationNumber10-2430700-
dc.identifier.patentApplicationNumber10-2021-0051119-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2021
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