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dc.contributor.author이병철-
dc.contributor.author이활-
dc.contributor.author최리노-
dc.date.accessioned2024-01-12T06:05:10Z-
dc.date.available2024-01-12T06:05:10Z-
dc.date.issued2021-10-22-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/79337-
dc.title정전용량형 미세가공 초음파 트랜스듀서-
dc.typePatent-
dc.date.registration2021-10-22-
dc.date.application2020-02-03-
dc.identifier.patentRegistrationNumberZL 202010078743.6-
dc.identifier.patentApplicationNumber202010078743.6-
dc.publisher.countryCC-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2020
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