DSpace at KISTKIST Patent2018

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dc.contributor.author이전국-
dc.contributor.author이재갑-
dc.date.accessioned2024-01-12T06:05:24Z-
dc.date.available2024-01-12T06:05:24Z-
dc.date.issued2021-01-20-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/79348-
dc.title직경 4“ 다이아몬드웨이퍼 합성용 7-음극 직류전원플라즈마 기상화학증착 다이아몬드합성장치-
dc.typePatent-
dc.date.registration2021-01-20-
dc.date.application2018-11-30-
dc.identifier.patentRegistrationNumber10-2207607-
dc.identifier.patentApplicationNumber10-2018-0152236-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2018
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